学术
国际标准刊号：ISSN 1681-1070
摘 要:
文章重点探讨了洁净厂房的正压值的控制问题，讨论了正压值与洁净度以及温度湿度之间的关系。根据现有洁净厂房的生产条件，分析了正压值和洁净度以及温湿度不能达标的具体原因。探索了实际生产中正压值控制的方法，并验证了其可行性。[著者文摘]
文章出处:
《电子与封装》-2007年7卷5期 -33-37页
Electronics & Packaging
栏目信息:
分 类 号:
文献标识码:
A
文章编号:
1681-1070（2007）05-0033-05
相关文章:
The Control Problem of the Room Pressure Value in Cleanroom
JIANG Mao, PAN Guo-hua, WANG Tie-kun （ Wuxi Microelectronics Institute,Wuxi 214035,China ）
Abstract:
This paper discusses the control problem of the room pressure value of the cleanroom. The connection of room pressure, cleanliness, temperature and humidity is also discussed, Based on the existence condition of the workshop, the reason for which the room pressure value, cleanliness, temperature and humidity cannot reach the standard value is analyzed, The way of the control problems of room pressure value was explored and the feasibility is validated.[著者文摘]
Key words:
cleanroom; cleanliness; temperature and humidity; room pressure; filter
收稿日期: 2006-08-03
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