学术
摘 要:
在电子工业领域中，曝光显影是生产过程中的重要工序。显影废液的处理与再生对生产成本的控制及环境保护都是相当重要的环节。由于各类显影废液中含有多种化学成分。经常在传送过程中附着在管壁上，并造成流量下降乃至管道堵塞。根据具体使用情况，介绍了由上海松下等离子显示器有限公司新近推出的一套气压式管道清洗系统，该系统丰富了工业领域的管道清洗方法，尤其适用于清洗电子工业领域的显影液废液的处理及排放管道。[著者文摘]
文章出处:
《电子工业专用设备》-2007年36卷7期 -57-59页
栏目信息:
分 类 号:
文献标识码:
B
文章编号:
1004-4507（2007）07-0057-03
相关文章:
Tube Cleaning System -- Using Vacuum Pump
HAN Qing-ming, KANG Jian-bing （Shanghai Matsushita Plasma Display Co. Ltd）
Abstract:
In electrical industry, exposure and develop are important steps. Treatment and regeneration of the Mixture liquid are important points for the control of cost and protect of environment. In every mixture liquids many chemical elements are often sticked to the tube in the coursing of flowing and cause the rate of flow descending and the tube being blocked up. According to the condition in our company, we develop a tube cleaning system-using vacuum pump, this system abundant the kinds of tube cleaning in industry area, especially apply to clean the tube of mixture liquid in electrical industry area.[著者文摘]
Key words:
Barometric; Tube Cleaning; Whirl-Wind Type Seperator; Vacuum Pump;
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