学术
微晶硅材料和电池特性的相关研究
张晓丹[1,2,3] 赵颖[1,2,3] 魏长春[1,2,3] 孙建[1,2,3] 赵静[4] 耿新华[1,2,3] 熊绍珍[1,2,3]
[1]南开大学光电子薄膜器件与技术研究所,天津300071 [2]南开大学光电子薄膜器件与技术天津市重点实验室,天津300071 [3]光电信息技术科学教育部重点实验室（南开大学,天津大学）,天津300071 [4]天津新华职工大学,天津300040
摘 要:
主要采用甚高频等离子体增强化学气相沉积技术制备了系列微晶硅材料和电池。通过对材料电学特性、结构特性和电池间性能关系的研究，获得了高效率微晶硅薄膜太阳电池所对应材料的基本特性：暗电导在10^8 s／cm量级上，光敏性大于1000，晶化率约50％。进行了制备电池的开路电压和表观带隙之间关系的研究。[著者文摘]
关 键 词:
文章出处:
《太阳能学报》-2007年28卷12期 -1304-1307页
分 类 号:
文献标识码:
A
文章编号:
0254-0096（2007）12-1304-04
STUDY OF RELATIONSHIP BETWEEN MICROCRYSTALLINE SILICON THIN FILM AND SOLAR CELLS
Zhang Xiaodan, Zhao Ying, Wei Changchu, Sun Jian, Zhao Jing, Geng Xinhua, Xiong Shaozhen （1. Institute of Photo-electronics Thin Film Devices and Technique of Nanji University, Tianfirt 300071, China; 2. Key Laboratory of Photo-electronics Thin Film Devices and Technique of Tianjin, Tianjin 300071, China; 3. Key Laboratory of Photelectronic Information Science and Technology （ Nankai University, Tianjin Universly ）, Ministry of Education, Tianjin 300071, China ; 4. Tianfin Xinhua Workers College, Tianfin 300040, China）
Abstract:
Series of microcrystalline silicon thin films and solar cells were fabricated by very high frequency plasma enhanced chemical vapor deposition. Through studying the relationship between electrical and structural properties of microcrystalline silicon thin films performances of microcrystaUine silicon solar cells, it can be concluded that microcrystalline silicon thin films incorporated into microcrystalline silicon solar cells with high conversion efficiency should have the following conditions： dark conductivity was in the order of 10^-8 s/cm, photosensitivity was larger than 1000 and crystalline fraction was about 50%. At the same time, the relationship between open circuit voltage of solar cells apparent band-gap was also studied.[著者文摘]
Key words:
very high frequency plasma enhanced chemical vapor deposition; high efficiency microcrystalline silicon solar cells; apparent band-gap
基金资助:
国家重点基础研究发展973规划项目（2006CB202602;2006CB202603）;国家自然科学基金项目（60506003）;南开大学博士启动基金（j02031）;科技部国际合作重点项目（2006DFA62390）;国家（973）高技术研究发展规划项目（2007AA052436）;教育部新世纪人才计划
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