国际标准刊号：ISSN 1005-4642
国内统一刊号：CN 22-1144
摘 要:
将干涉显微镜的应用推广到透明薄膜厚度的测量，扩展了干涉显微镜的测量范围和应用领域．基于菲涅耳公式，分析了透明薄膜界面的反射．根据白光干涉原理，利用圆形样品台的定量移动，实现了薄膜厚度的测量．[著者文摘]
文章出处:
《物理实验》-2008年28卷2期,13 -5-7,13页
Physics Experimentation
栏目信息:
分 类 号:
文献标识码:
A
文章编号:
1005-4642（2008）02-0005-03
[参考文献]
Improvement and analysis of measuring thickness using interference microscope
XU Jian, OU Ai-qing, HUANG Zuo-hua（School of Physics ＆ Telecommunication Engineering, South China Normal University, Guangzhou 510006, China）
Abstract:
The interference microscope has been applied to the measurement of the transparent thin film thickness, thus the measurement range and the application field of the interference microscope have been expanded. Basing on Freshnel formula, the reflection on the interfaces of the trans-parent thin film has been analyzed. According to the principle of white light interference, the measurement of the film thickness is realized by using the quantitative movements of the circular sample holder.[著者文摘]
Key words:
interference microscope; interference of white light; transparent thin film; thickness
收稿日期: 2007-09-26
修订日期: 2007-12-16
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