学术
ZrO2/Si）2溶胶-凝胶薄膜膜层间的渗透行为
王毕艺[1,2] 祖小涛[1] 赵松楠[2] 郭袁俊[1] 李绪平[1,2] 徐世珍[1] 吕海兵[2] 蒋晓东[2] 郑万国[2]
[1]电子科技大学物理电子学院,成都610054 [2]中国工程物理研究院激光聚变研究中心,四川绵阳621900
摘 要:
分别以丙醇锆和正硅酸乙酯为原料，采用溶胶-凝胶工艺制备了性能稳定的SiO2和SiO2溶胶。用旋转镀膜法在K9玻璃上分别制备了单层Si02薄膜、单层SiO2薄膜、SiO2／SiO2双层膜和SiO2／ZrO2双层膜。采用原子力显微镜观察了薄膜的表面形貌．用椭偏仪测量薄膜的厚度与折射率，用紫外-可见光分光光度计测量了薄膜的透射率。对薄膜的透射光谱和椭偏仪模拟的数据进行分析，发现SiOz／ZrO2双层膜之间的渗透十分明显，而ZrO2／SiO2双层膜之间几乎不发生渗透。利用TFCalc模系设计软件，采用三层膜模型对薄膜的透射率进行模拟，得出的透射曲线与用紫外一可见光分光光度计测量的透射曲线十分符合。[著者文摘]
文章出处:
《强激光与粒子束》-2007年19卷9期 -1497-1500页
栏目信息:
分 类 号:
文章编号:
1001-4322（2007）09-1497-04
Infiltrating between ZrO2 and SiO2 Sol-Gel films
WANG Bi-yi, ZU Xiao-tao, ZHAO Song-nan, GUO Yuan-jun, LI Xu-ping, XU Shi-zhen, LU Hai-bing, JIANG Xiao-dong, YUAN Xiao-dong, ZHENG Wan-guo（1. School of Physics and Electron, University of Electronic Science and Technology of China, Chengdu 610054, China; 2. Research Center of Laser Fusion, CAEP, P. O. Box 919-987, Mianyang 621900, China）
Abstract:
The single-layer SiO2, single-layer ZrOz ,two-layer ZrOz/SiOz and two-layer SiOz/ZrOz thin films were deposited on K9 glass by Sol-Gel spin-coating method. The colloidal suspension of ZrQ2 was prepared using Zr（OPr）4 and colloidal suspension of SiOz was prepared using TEOS as precursor. The surface morphologies of SiOz and ZrOz thin films were observed by AFM. Ellipsometry was used to measure the thickness and refractive index of the films. UV-VIS spectrophotometer was used to measure the transmittance of the films. The results showed that the infiltration of the two-layer SiOz/ZrO2 film was much serious than that of the two-layer ZrOz / SiO2 film, which is very trifling. With the TFCalc thin film design software, the transmittance of the films was simulated with the theoretical three-layer model. The simulated results accorded with the experiments very well.[著者文摘]
Key words:
Ellipometry; Thin film design; Sol-Gel; Infiltrating; Transmittance
基金资助:
国家863计划项目资助课题
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