学术
掺Sm2O3的SnO2纳米粉体对C2H2气敏特性的研究
范会涛[1] 张彤[1] 漆奇[1] 刘丽[1,2]
[1]集成光电子学国家重点联合实验室吉林大学实验区,吉林大学电子科学与工程学院,长春130012 [2]吉林大学物理学院朝阳校区物理中心,长春130012
摘 要:
用化学沉淀法制备了SnO2纳米材料,利用XRD和SEM对合成产物进行了表征.采用旁热式结构制成了以SnO2为基体材料,掺杂Sm2O3的气体传感器.通过元件对C2H2气敏特性的测试表明：Sm2O3的掺杂可以明显地提高SnO2气敏材料对C2H2气体的灵敏度,当工作温度为180℃,C2H2浓度为1000ppm时,元件的灵敏度为64,响应恢复时间分别为3和20s.讨论了不同相对湿度对元件气敏特性的影响.[著者文摘]
文章出处:
《半导体学报》-2008年29卷2期 -319-323页
栏目信息:
分 类 号:
文献标识码:
A
文章编号:
0253-4177（2008）02-0319-05
Preparation and C2H2 Sensing Characteristics of Sm2O3-Doped SnO2 Gas Sensors
Fan Huitao , Zhang Tong, Qi Qi , Liu Li（1. State Key Laboratory of Integrated Optoelectronics , College of Electronic Science and Engineering JilinUniversity, Changchun 130012, China;2 College of Physics, Jilin University, Changchun 130012, China）
Abstract:
Sm2O3-doped SnO2 nano powders are prepared with chemical deposition and characterized by X-ray diffraction and scanning electron microscopy. The studies reveal that the addition of Sm^2 O3 improves the C2H2 sensing properties of the SnO2 gas sensor. The best performance of the sensor is obtained at an operating temperature of 180℃. The sensor exhibits high sensitivity （64 to 1000 ppm vol. ratio C2H2） and rapid response and recovery （about 3 and 17s, respectively）. The effect of humidity on the sensor＇s response to C2 H2 is also investigated.[著者文摘]
Key words:
SnO2 ; Sm2O3 ; C2H2 ; gas sensor; nano powder
基金资助:
吉林省科技厅（批准号：20060528）; 低维材料及其应用技术教育部国家重点实验室开放基金（批准号：KF0706）资助项目
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