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英国
投稿预审
Materials Science in Semiconductor Processing 中科院3区 JCR:Q2 SCIE EI CA PubMed JST
发文量 10,378
被引量 204,769
影响因子(2025版) 4.609

Materials Science in Semiconductor Processing provides a unique forum for the discussion of novel processing, applications and theoretical studies of functional materials and devices for (opto)electronics, sensors, detectors, biotechnology and green energy. Each issue will aim to provide a snapshot of current insights, new achievements, breakthroughs and future trends in such diverse fields as microelectronics, energy conversion and storage, communications, biotechnology, (photo)catalysis, nano- and thin-film technology, hybrid and composite materials, chemical processing, vapor-phase deposition, device fabrication, and modelling, which are the backbone of advanced semiconductor processing and applications. Coverage will include: advanced lithography for submicron devices; etching and related topics; ion implantation; damage evolution and related issues; plasma and thermal CVD; rapid thermal processing; advanced metallization and interconnect schemes; thin dielectric layers, oxidation; sol-gel processing; chemical bath and (electro)chemical deposition; compound semiconductor processing; new non-oxide materials and their applications; (macro)molecular and hybrid materials; molecular dynamics, ab-initio methods, Monte Carlo, etc.; new materials and processes for discrete and integrated circuits; magnetic materials and spintronics; heterostructures and quantum devices; engineering of the electrical and optical properties of semiconductors; crystal growth mechanisms; reliability, defect density, intrinsic impurities and defects. Submit your manuscript

  • 主办单位： ELSEVIER SCI LTD
  • 出版地区： LONDON
  • 出版周期： 月刊
  • 别名： MAT SCI SEMICON PROC;MATER SCI SEMICOND PROCESS;Mater Sci Semicond Process;Mater. Sci. Semicond. Process;Mater. Sci. Semicond. Process.;MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING;Materials science in semiconductor processing;半导体加工中的材料科学
  • 国际标准连续出版物号/电子版： ISSN 1369-8001 / EISSN 1873-4081
  • 创刊时间： 1998年
  • 曾用名： Solid-state electronics
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2027年--期
共：39篇

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2027年--期

2027年--期

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