别名: JVSTB;J VAC SCI TECHNOL B;J. Vac. Sci. Technol. B;J. Vac. Sci. Technol., B:Nanotechnol. Microelectron.;JVST B;Journal of Vacuum Science & Technology, B: Nanotechnology & Microelectronics: Materials, Processing, Measurement, & Phenomena;Journal of Vacuum Science & Technology B;Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;真空科学与技术期刊B部分:纳米技术与微电子学;Journal of Vacuum Science and Technology B;JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B;Journal of vacuum science and technology. B, Nanotechnology & microelectronics : materials, processing, measurement, & phenomena : JVST B
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曾用名:Journal of vacuum science & technology. B, Microelectronics and nanometer structures